Quartz Quartz

classification

BOAT (Quartz Boat) Quartz Boat

OUTER TUBE (Quartz Outer Tube) Quartz Outer Tube

PEDESTAL (Quartz Pedestal) Quartz Pedestal

Channel structure made of high-purity fused silica for wafer positioning and carrying

high-purity quartz by drawing or machining plays the role of a main chamber (container) in a heat treatment apparatus.

support structure components made of high-purity quartz for firmly carrying quartz boats or wafer supports.

Main Functions

Precise positioning of wafer through slot structure

uses ≥ 99.99 SiO₂ ultra-high purity materials to minimize metal contamination

supports uniform heating at a high temperature of about 1200°C

Keep the gap between wafers uniform

create a vacuum or controlled atmosphere (O₂, H₂, etc.)

maintains structural stability in repeated high-temperature thermal cycling environments

isolate and control internal heat and air flow

has low thermal expansion coefficient and excellent corrosion resistance

Support and fix the quartz boat

auxiliary furnace tube gas flow homogenization

Improve heat conduction stability

Maintain consistency of wafer environment during process

working principle

vertical wafer alignment

Maintains Process Gas and Temperature Uniformity Through Sealing Structure

Balance of heat distribution and gas diffusion by optimizing the support structure

Applicable process

diffusion, oxidation, annealing, CVD pretreatment and wafer transfer

high temperature diffusion, oxidation, annealing, cleaning

diffusion, oxidation, annealing, CVD pretreatment and wafer transfer

Customer Expected Effect

improves wafer alignment accuracy and reduces contamination risk

Improve process uniformity and yield

ensures high temperature process stability

Improve long-term durability and equipment life

improves process uniformity and thermal stability

improvement rate and process repeatability